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The Center for X-Ray Optics is a multi-disciplined research group within Lawrence Berkeley National Laboratory's (LBNL) Materials Sciences Division (MSD). Notice to users.

The world's highest resolution projection lithography tool.

The SEMATECH Berkeley Microfield Exposure Tool (MET)

"For a new lithography technology to be successful, the supporting ecosystem must be developed years in advance. The MET is used by researchers from around the world for early learning in key areas such as resists, processing, and masks."

Patrick Naulleau,
MET Principal Investigator

Photo of Patrick Naulleau, CXRO Staff Scientist

About the MET.

The MET is a SEMATECH-sponsored 0.3-NA extreme ultraviolet (EUV) microlithography tool situated on undulator beamline 12.0.1.3 of the Advanced Light Source at Lawrence Berkeley National Laboratory. The MET has a unique programmable coherence illuminator that allows it to achieve world-leading 12-nm imaging resolution.

Demonstration of sub-16 nm patterning at the SEMATECH Berkeley Microfield Exposure Tool (MET)

World's first demonstration of sub-16-nm dense patterning using conventional photolithography. February 2010.

The leader in resolution.

The MET’s unique capabilities allow it to reach down to 12-nm, today, giving researchers a clear and unparalleled view into the future of photolithography. Using these capabilities, materials researchers from Inpria Corporation have developed photoresists capable of sub-16-nm patterning.

Inpria and SEMATECH Logos

Resist research.

Resist line edge roughness (LER) negatively affects process yield and device performance. Working in collaboration with industry, national labs, and academia, CXRO researchers use the MET to quantify LER, find its root causes, and discover ways to mitigate it. The image to the right shows anisotropic three-dimensional details of typical LER.

Scanning Electron Microscope (SEM) image of anisotropic three-demensional details of typical line-edge-roughness (LER).

Visit the MET homepage.

Visit met.lbl.gov to learn more about the MET.

The MET team.

Photo of Chris Anderson

Chris Anderson

Project Scientist
Photo of Suchit Bhattarai

Suchit Bhattarai

Graduate Student Research Assistant
Photo of Mark Binenbaum

Mark Binenbaum

Senior Research Technician
Photo of Rikos Chao

Rikos Chao

Graduate Student Research Assistant
Photo of Rene Claus

Rene Claus

Graduate Student Research Assistant
Photo of Michael Jones

Michael Jones

ME Technologist
Photo of Chanin King

Chanin King

Research Technician
Photo of Ryan Miyakawa

Ryan Miyakawa

Project Scientist
Photo of Patrick Naulleau

Patrick Naulleau

CXRO Director &
Senior Staff Scientist
Photo of Gayan Pothuhera

Gayan Pothuhera

Research Technician
Photo of Jessica Ritland

Jessica Ritland

Senior Research Technician
Photo of Kurt Schlueter

Kurt Schlueter

Research Technician
Photo of Jessalyn Sincher

Jessalyn Sincher

Senior Research Technician