About CXRO
About CXRO People
Research
EUV Lithography Soft X-ray Science Scientific Instrumentation Microelectronics Nanomagnetism
DOE Projects
ANGEL FlexBrain CHiPPS Nanohybrid
Capabilities
MET5 SHARP Nanofabrication
Reflectometry / Scatterometry Optical Coatings Engineering Resist FundamentalsPES / TEY / FTIR / EAL RSoXS
News & Publications
X-Ray Database MET5 User Portal Materials Sciences Division
Contact

Lady Bonifacio

Administrator

Center for X-Ray Optics · Lawrence Berkeley National Laboratory