Beamline 6.3.2 is a PRT-owned bend magnet beamline dedicated to
EUV and soft x-ray reflectometry and scattering. The beamline,
in operation since February 1995, is
designed for high spectral purity and wavelength accuracy. Owned by
the Berkeley Labs Center for X-ray Optics, the beamline is used for
the characterization of optical components and reflective coatings for
a variety of applications including EUV lithography.
High spectral resolution is obtained using a variable-line spaced
plane grating monochromator. The monochromator, designed and
constructed by the Center for X-ray Optics, uses no entrance slit and
a fixed exit slit. The light is focussed onto the sample by the first
horizontally deflecting mirror and a bendable refocusing mirror
downstream from the monochromator. High spectral purity is achieved
using a combination of filters and a triple mirror "order-suppressor".
A permanent reflectometer end-station is available. A sample may be
positioned in three dimensions to a precision of 4 microns. Samples
of up to 8 inches in diameter may be accomodated. An array of
detectors including a photodiode, channeltron and CCD camera are
mounted on a rotating arm. Space is available for additional
endstations downstream from the reflectometer.
For more information on beamline 6.3.2, please contact: