The Center for X-Ray Optics is a multi-disciplined research group within Lawrence Berkeley National Laboratory's (LBNL) Materials Sciences Division (MSD). Notice to users.
The world standard for EUV and
x-ray reflectance measurements.
The CXRO Reflectometer
"Mirrors and detectors are the foundation of soft
x-ray science. We routinely measure the reflectivity and scattering properties of the most advanced x-ray and EUV optics in the world."
Eric Gullikson,
CXRO Reflectometer Principal Investigator
A worldwide standard.
The CXRO Reflectometer serves as a worldwide reference standard. Its high accuracy and un- rivaled precision enable it to characterize the fundamental optical properties of materials, the quality of optical elements, the efficiency of grating spectrometers, the scattering properties of ultra-smooth surfaces, and the sensitivity of detectors, at EUV and soft x-ray wavelengths.
ALS Beamline 6.3.2 layout
Beamline specifications
- Wavelength precision: 0.007%
- Wavelength uncertainty: 0.0123%
- Reflectance precision: 0.08%
- Reflectance uncertainty: 0.08%
- Spectral purity: 99.98%
- Dynamic range: 1010
Endstation specifications
- 10 μm x 300 μm beam size
- 10 μm positioning precision
- Angular precision: 0.01 deg
- 6 degrees of freedom
- Sample size up to 200 mm
